发明名称 FLOW CONTROL VALVE AND FLOW CONTROL SYSTEM USING SAME
摘要 [Problem] The present invention provides a flow control valve that maintains the flow of clean liquid while allowing setting change and a flow control device. [Solution] The invention comprises: the valve body (11) consisting of the differential pressure unit (15) and the valve sheet (16); the first diaphragm (30) separated by the No. 1 and No. 2 chambers (21, 22); the second diaphragm (35) with a valve body (38) separated by the No. 3 and No. 4 chambers (26, 27); the differential pressure control valve unit that moves back and forth in front of the differential pressure opening unit and allows the flow of the liquid to be controlled at a stable level by moving the valve body (38) back and force toward the valve sheet (16) depending on the pressure on the differential pressure unit (15) by forming a connecting chamber (70) between the No. 2 chamber (22) and the No. 4 chamber (27), with the No. 1 operational unit (40) moving back and forth in relation to the first diaphragm (30) and the No. 2 operational unit (50) moving back and forth in relation to the second diaphragm (35). In addition, it provides a connecting chamber (70) between the No. 2 chamber (22) and the No. 4 chamber (27), with an intermediate transmission unit (80) transmitting changes between the No. 1 operational unit and the No. 2 operational unit (40, 50) with each other, allowing maintenance of the flow of the liquid to be controlled at a stable level by moving the valve body (38) back and forth toward the valve sheet (16) depending on the pressure on the differential pressure unit (15). It also provides the differential pressure control valve body and a means to move the differential pressure control valve body back and forth.
申请公布号 KR20150042699(A) 申请公布日期 2015.04.21
申请号 KR20140111547 申请日期 2014.08.26
申请人 아드반스 덴키 고교 가부시키가이샤 发明人 사사오 키미히토
分类号 H01L21/02;H01L21/302 主分类号 H01L21/02
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