| 摘要 |
<p>According to an embodiment of the present invention, a manufacturing method for a flexible array of an ultrasonic probe comprises: a piezo-electric material attaching step which attaches a piezo-electric material with an electrode to one side of silicon; a photo resist step which cuts the central part of the piezo-electric material and then forms a photo resist material in the upper part of the cut piezo-electric material; a flexibility providing step which fills a flexible material into a gap between the piezo-electric materials engraved by the photo resist and into a concave part on the silicon; and a metal connecting step which removes part of the photo resist material in the upper part of the piezo-electric material, and connects the cut and separated piezo-electric materials using bridge metal. Therefore, a flexible array of an ultrasonic probe manufactured thereby can provide flexibility by including a flexible material between piezo-electric materials, can provide excellent focusing of sound waves by being easily coupled to even a case with a curved surface, and can facilitate the flow of electric power between the piezo-electric materials by electrically connecting the piezo-electric materials using bridge metal.</p> |
