| 摘要 |
PROBLEM TO BE SOLVED: To suppress electrification of a sample and improve analysis accuracy in an X-ray photoelectron spectroscopic analysis method.SOLUTION: The X-ray photoelectron spectroscopic analysis method comprises preparing a sample in which an insulative carrier layer is formed on a conductive substrate, and metal particles are carried dispersedly on the surface of the insulative carrier layer on the side opposite to the substrate side, and applying X-rays to the side of the sample where the metal particles are carried to measure photoelectron spectra. |
