| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate control device which is capable of accurately obtaining a flow rate of a fluid even when a zero value is shifted in a period from zero value correction until the restart of the flow rate control device.SOLUTION: A flow rate control device 10 includes: a flow channel 20 in which a fluid flows; a flowmeter sensor unit 30 which measures a flow rate of the fluid flowing in the flow channel; an adjustment valve 40 which adjusts the flow rate of the fluid flowing in the flow channel, to a set flow rate; and a control unit 50 which calculates a flow rate of the fluid on the basis of a signal outputted from the flowmeter sensor unit. The control unit performs zero value monitoring in which it is monitored that a calculated flow rate value is a zero value till the flow channel is opened by the adjustment value after zero value correction in which the flow rate value calculated when the flow channel is closed by the adjustment valve is to be zero. The control unit performs the zero value correction if the calculated flow rate value exceeds a range of a preliminarily set threshold during the zero value monitoring. |
