发明名称 DEPOSITON APPRATUS AND IN LINE DEPOSITION SYSTEM COPRISING THE SAME
摘要 <p>This invention is about a deposition apparatus and in a line deposition system comprising the same. The invention includes: a linear bar module with mutually separated nozzles to deposit the evaporation materials on the glass; source-supplying module with a hight-adjustable internal crucible to maintain a consistent level of evaporation materials of the linear bar module and connected to the linear bar module to supply evaporation materials; and an auto-level module controling the height of internal crucible to keep the level of evaporation materials. With these elements, the invention can maintain the consistent supply of evaporation materials on the glass and to the linear bar module by keeping the consistent level of evaporation level, maintaining the heat transfer distance from the linear bar module and to the evaporation materials.</p>
申请公布号 KR20150042051(A) 申请公布日期 2015.04.20
申请号 KR20130120784 申请日期 2013.10.10
申请人 发明人
分类号 C23C14/12;C23C14/24;H01L51/56;H05B33/10 主分类号 C23C14/12
代理机构 代理人
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