DEAERATION TANK, COATING APPLICATOR, AND SUBSTRATE BONDING DEVICE

摘要

PROBLEM TO BE SOLVED: To accurately feed a stored liquid.SOLUTION: An deaeration tank 24 includes: a tank body 31; agitation mechanisms 33A, 33B; a deaeration mechanism 36; and pump mechanisms 34, 35. The agitation mechanisms 33A, 33B agitate a liquid 110 stored in the tank body 31. The deaeration mechanism 36 suctions a gas from the tank body 31 to deaerate the liquid 110. The pump mechanisms 34, 35 pump the liquid 110 stored in the tank body 31 from a drain port 44.