| 发明名称 |
MICROELECTROMECHANICAL PRESSURE SENSORS |
| 摘要 |
A pressure sensitive element is provided. In one embodiment the pressure sensitive element comprises: a diaphragm with a gage side and a back side and a rim surrounding the diaphragm; a pair of inner islands on the gage side of the diaphragm wherein the pair of inner islands are spaced to form a first gap between the pair of inner islands; a first freed gage spanning the first gap; at least one bridge to provide an electrical communication path between the rim and the first freed gage; an outer island on the gage side of the diaphragm wherein the outer island and the rim are spaced to form a second gap; and a second freed gage spanning the second gap. |
| 申请公布号 |
US2015101413(A1) |
申请公布日期 |
2015.04.16 |
| 申请号 |
US201314054715 |
申请日期 |
2013.10.15 |
| 申请人 |
Meggitt (Orange County), Inc. |
发明人 |
KWA TOM;Wilner Leslie Bruce |
| 分类号 |
G01L7/08 |
主分类号 |
G01L7/08 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A pressure sensitive element comprising:
a diaphragm with a gage side and a back side; a rim surrounding the diaphragm; a pair of inner islands on the gage side of the diaphragm wherein the pair of inner islands are spaced to form a first gap between the pair of inner islands; a first freed gage spanning the first gap; at least one bridge to provide an electrical communication path between the rim and the first freed gage; a first outer island on the gage side of the diaphragm wherein the first outer island and the rim are spaced to form a second gap; and a second freed gage spanning the second gap. |
| 地址 |
Irvine CA US |
