| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical module capable of making an optical component operate stably and accurately by using an electrostatic actuator.SOLUTION: An optical module 1A comprises: a semiconductor substrate 2; an electrostatic actuator 10 including a fixed part 11 fixed on the semiconductor substrate 2 and a movable part 12 to be made to move relative to the fixed part 11 by electrostatic force generated between the fixed part 11 and the movable part 12; a first spring part 20 which is connected to the movable part 12 and has a first spring constant K1; a second spring part 30 which is connected between the first spring part 20 and semiconductor substrate 2 and has a spring constant K2 larger than the first spring constant K1; and a movable mirror 5 connected to a connection part 13 between the first spring part 20 and second spring part 30. |
