发明名称 ULTRAVIOLET DETECTOR AND MANUFACTURING METHOD OF THE SAME
摘要 The present invention relates to an ultraviolet sensor comprising; two electrodes arranged to be separated from each other; a Zn metal layer formed on the surface of the electrodes; and a nano-bridge with both ends connected to each Zn metal layer on the two electrodes, which is formed by growing a nanowire made of a ZnO material on the surface of the Zn metal layer. The manufacturing method for the ultraviolet sensor of the present invention has an effect of being effectively applied to a low cost manufacturing process by including the nano-bridge formed of ZnO nanowires grown from the Zn metal layer deposited on the surface of the separated electrodes, thereby removing the necessity of growing the ZnO nanowires in a vertical direction. In addition, the ultraviolet sensor and a manufacturing method as described above is effective in obtaining the improved chemistry reaction rate for the ultraviolet sensor by joule-heating the nano-bridge in advance. Furthermore, a method of using the ultraviolet sensor is effective to improve the chemistry reaction rate of the ultraviolet sensor by joule-heating of nano-bridge prior to use.
申请公布号 KR20150041206(A) 申请公布日期 2015.04.16
申请号 KR20130118313 申请日期 2013.10.04
申请人 한양대학교 에리카산학협력단 发明人 유봉영;윤상화
分类号 G01J1/02;H01L31/09 主分类号 G01J1/02
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