| 摘要 |
A crucible heating apparatus (20) comprises a crucible (21), a metal cylinder (23) surrounding the exterior of the crucible (21), an electric heating wire (22) wound between the crucible (21) and the metal cylinder (23), a measurement unit for measuring the liquid level position of materials in the crucible (21), and a controller. The electric heating wire (22) includes at least two subsections arranged along longitudinal direction. The heating power of each subsection is controlled respectively by the controller so that the crucible (21) is divided into at least two corresponding temperature control regions (26). A heating method for using the crucible heating apparatus (20) comprises the following steps: step 1: arranging the crucible heating apparatus (20); step 2: putting the materials to be evaporated into the crucible (21); step 3: respectively setting different subsections of the electric heating wire (22) into initial heating power; step 4: evaporating the materials and monitoring the liquid level position of the materials in the crucible (21) through the measurement unit; step 5: regulating the heating power of different subsections of the electric heating wire (22) until the materials are evaporated to the required degree according to the liquid level position of the materials. By means of the crucible heating apparatus (20) and the using method thereof, the material filling amount of the crucible is enlarged, cavity opening times are reduced, and the utilization rate of a machine platform is increased. |
