ULTRA-LOW OXYGEN AND HUMILITY LOADPORT AND STOCKER SYSTEM

摘要

One or more pods for adjusting at least one of an oxygen content or a water content therein and methods of their use are provided, where one or more semiconductor wafer are selectively stored within a storage chamber of the pod. The pod comprises a storage chamber having a side wall surface defining an opening at one side thereof and a pod door fitted to the storage chamber at the opening so as to provide ingress and egress to the storage chamber. The pod door comprises a door body, a first door locking mechanism on the door body and a seal band configured to engage the sidewall surface. The first door locking mechanism comprises a first pressure applicator, a first key assembly and a first connector-rod.

主权项

1. A pod comprising:
a storage chamber having a side wall surface defining an opening at one side thereof; and a pod door fitted to the storage chamber at the opening so as to provide ingress and egress to the storage chamber, the pod door comprising:
a door body;a first door locking mechanism on the door body, the first door locking mechanism comprising:
a first pressure applicator;a first key assembly; anda first connector-rod; anda seal band configured to engage the sidewall surface.