发明名称 |
ENABLING HIGH ACTIVATION OF DOPANTS IN INDIUM-ALUMINUM-GALIUM-NITRIDE MATERIAL SYSTEM USING HOT IMPLANTATION AND NANOSECOND ANNEALING |
摘要 |
<p>Embodiments of the present disclosure generally relate to doping and annealing substrates. The substrates may be doped during a hot implantation process, and subsequently annealed using a nanosecond annealing process. The combination of hot implantation and nanosecond annealing reduces lattice damage of the substrates and facilitates a higher dopant concentration near the surface of the substrate to facilitate increased electrical contact with the substrate. An optional capping layer may be placed over the substrate to reduce outgassing of dopants or to control dopant implant depth.</p> |
申请公布号 |
WO2015053996(A1) |
申请公布日期 |
2015.04.16 |
申请号 |
WO2014US58555 |
申请日期 |
2014.10.01 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SRINIVASAN, SWAMINATHAN T.;KHAJA, FAREEN ADENI |
分类号 |
H01L21/265;H01L21/324 |
主分类号 |
H01L21/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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