发明名称 OPTICAL INTERFEROMETER COMPRISING A STATIONARY MIRROR AND A DYNAMICALLY USABLE MOVABLE MIRROR, AND METHOD FOR CONTROLLING THE SPACING SEPARATING THE MIRRORS OF THE INTERFEROMETER
摘要 <p>Interferometer comprising a holder on which a stationary mirror (1) and a movable mirror (2) are mounted parallel to each other, and means for adjusting a spacing separating the mirrors from each other, characterized in that the movable mirror is connected to the holder by elastic suspending means (4) and in that the means for adjusting the spacing separating the mirrors comprise at least three pairs of facing electrodes (5) that are connected to a control unit arranged to supply the electrodes so that they form electrostatic actuators and detectors and keep the movable mirror in position by placing the suspending means under stress. Method for adjusting such an interferometer.</p>
申请公布号 WO2015052252(A1) 申请公布日期 2015.04.16
申请号 WO2014EP71570 申请日期 2014.10.08
申请人 SAGEM DEFENSE SECURITE 发明人 RAGOT, VINCENT
分类号 G02B5/28;G01J3/26;G02B26/00 主分类号 G02B5/28
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