| 摘要 |
<p>PURPOSE: A surface texturizing method is provided to enhance adhesive strength of an inner surface of a process chamber by reducing contamination due to particles condensed thereon. CONSTITUTION: A scanning process is performed to scan an electromagnetic beam across a surface of a component for a sufficient period of time to form a plurality of features thereon(804). A roughening process is performed to roughen the surface and features of the component(806,808). The scanning process includes a transit time and a dwell time. The electromagnetic beam has a power density at a point on the surface of the component upon which the beam is directed in a range of about 10¬4W/mm¬2 to about 10¬7W/mm¬2.</p> |
