| 摘要 |
<p>The present invention relates to an optical position measurement apparatus to measure positions of two objects that can move toward each other comprising: a measuring graduation connected to one of two objects; and a scanning system connected to one of two objects to scan the measuring graduation. Using the scanning system, positioning along a vertical displacement as well as a first side direction of an object is available at the same time. To this end, two scanning beam paths in which a group of phase delayed signals can be generated from the superposed partial optical beam to an output side are formed respectively. At least one third scanning beam path which can be positioned depending on a displacement direction (X) of a second side direction is further formed by the scanning system. A ray of light can be transferred to the scanning system by a common coupling optical device for a first optical guide and all of three scanning beam paths. Interrupting partial optical beam generated in the three scanning beam paths can be coupled to a second optical guide to transferring the optical beam to a detecting device through a common out-coupling optical device.</p> |
