| 摘要 |
<p>PROBLEM TO BE SOLVED: To solve such a problem that it is difficult to adopt a fan device in light of a life of a fan even though it can be conceived to commonly use a cooling fan device.SOLUTION: A turbo molecular pump device has: a turbo molecular pump body; a power source device 14 for driving the turbo molecular pump device; and a water-cooling device 13 interposed between the turbo molecular pump body and the power source device. Components provided in a housing 140 of the power source device are classified into strong-cooling required components requiring strong-cooling, medium-cooling required components requiring medium-degree cooling, and cooling non-required components rarely requiring cooling. The strong-cooling required components are mounted on a first high conductive substrate contacting the water-cooling device, the medium-cooling required components are mounted on a second high conductive substrate contacting an inner face of the housing, and the cooling non-required components are arranged in a space between the first high conductive substrate and the second high conductive substrate.</p> |
