发明名称 MICROSCOPY SUPPORT STRUCTURES
摘要 Electron microscope support structures and methods of making and using same. The support structures are generally constructed using semiconductor materials and semiconductor manufacturing processes. The temperature of the support structure may be controlled and/or gases or liquids may be confined in the observation region for reactions and/or imaging.
申请公布号 EP2153461(B1) 申请公布日期 2015.04.15
申请号 EP20080769383 申请日期 2008.05.09
申请人 PROTOCHIPS, INC. 发明人 DAMIANO, JOHN, JR.;MICK, STEPHEN E.;NACKASHI, DAVID P.
分类号 H01J37/20;H01J37/26;H01L21/3065;H01L21/66 主分类号 H01J37/20
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