| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly reliable and compact myoelectric sensor that ensures more accurate myopotential measurement. <P>SOLUTION: The myoelectric sensor 10 includes: a MEMS element 20, a measuring circuit element 30, a base substrate 40, detection external electrodes 51 and 52; a casing 60; wiring 70; and via electrodes 71 and 72. The MEMS element 20 and the measuring circuit element 30 are mounted on the base substrate 40, and the detection external electrodes 51 and 52 are disposed on the surface of the base substrate 40 opposite the surface on which the elements are mounted. The casing 60 is disposed on the element mounted surface of the base substrate 40. The myoelectric sensor 10 executes myopotential measurement while bringing the detection external electrodes 51 and 52 in contact with the living body 100. The MEMS element 20 includes two comb electrode pairs whose distances are varied with drive signals. Each comb electrode pair is connected to the detection external electrode 51 or 52 via the via electrode 71 or 72, and connected to the measuring circuit element 30 via the wiring 70. <P>COPYRIGHT: (C)2013,JPO&INPIT |
