| 摘要 |
<p>The present invention includes a movable table (2) which can accommodate the work piece and move to the X- and Y-axis to process the work piece; more than one measuring scale (5) whose flat surface is extended from the X- and Y-axis which is located around the tool (3); and the scanning heads (1, 1′) installed in at least three corners of the table (2) to measure the location of the table (2) in relation to the measuring scale (5). The table′s (2) location is determined by the work piece with six measuring dimensions (X, Y, Z, rX, rY, and rZ) through the scanning heads (1, 1′). In order to determine the 3D location of three independent spatial directions (X, Y, and Z), at least one of the three corners must have more than one scanning head (1, 1′) with at least three measuring axes. In this case, the sensitivity vectors (v1, v2, v3, v4) of the measuring axes for measuring the 3D location do not locate either in the X-Z plane or in the Y-Z plane. When the table moves in the major transition direction (X, Y), all measuring axes supply cycle signals (refer to Figure 3).</p> |
