Thermo-pneumatic actuator working fluid layer

摘要

An ink jet printhead including a thermo-pneumatic actuator array for ejecting ink from an array of nozzles. The actuator array may include a plurality of channels in fluid communication with a plurality of working fluid chambers. After completing formation of the actuator array, working fluid may be injected into a working fluid inlet on an exterior of the actuator array and into the plurality of working fluid chambers through the plurality of channels.

主权项

1. A printhead comprising a plurality of thermo-pneumatic (TP) actuators as part of a TP actuator array, wherein the TP actuator array comprises:
a substrate; a plurality of resistors, wherein each resistor of the plurality of resistors is individually addressable; a standoff layer formed over the substrate, wherein the standoff layer comprises a plurality of channels therethrough that extend between adjacent TP actuators of the TP actuator array; a TP actuatable membrane between a working fluid chamber and an ink chamber for each of the plurality of TP actuators, wherein the TP actuatable membrane is attached to the standoff layer; a support layer attached to the TP actuatable membrane, wherein the TP actuatable membrane is interposed between the support layer and the standoff layer; a nozzle plate attached to the support layer; at least one working fluid inlet on an exterior surface of the TP actuator array; and at least one working fluid outlet on the exterior surface of the TP actuator array, wherein the plurality of channels are each in fluid communication with the at least one working fluid inlet and the at least one working fluid outlet.