| 发明名称 | Method of fabricating composite field emission source | ||
| 摘要 | A method of fabricating a composite field emission source is provided. A first stage of film-forming process is performed by using RF magnetron sputtering, so as to form a nano structure film on a substrate, in which the nano structure film is a petal-shaped structure composed of a plurality of nano graphite walls. Afterward, a second stage of film-forming process is performed for increasing carbon accumulation amount on the nano structure film and thereby growing a plurality of nano coral-shaped structures on the petal-shaped structure. Therefore, the composite field emission source with high strength and nano coral-shaped structures can be obtained, whereby improving the effect and life of electric field emission. | ||
| 申请公布号 | US9005407(B2) | 申请公布日期 | 2015.04.14 |
| 申请号 | US201113317955 | 申请日期 | 2011.10.31 |
| 申请人 | Tatung Company;Tatung University | 发明人 | Jeng Jian-Min;Lo Jyi-Tsong;Shih Wen-Ching;Tasi Wei-Lung |
| 分类号 | C23C16/26;H01J9/02;C23C16/455;H01J1/304 | 主分类号 | C23C16/26 |
| 代理机构 | J.C. Patents | 代理人 | J.C. Patents |
| 主权项 | 1. A method of fabricating a composite field emission source, comprising: performing a first stage of film-forming process by using a radio frequency (RF) magnetron sputtering, so as to form a nano structure film on a substrate, wherein the nano structure film comprises a petal-shaped structure composed of a plurality of nano graphite walls; and performing a second stage of film-forming process, so as to increase a carbon accumulation amount on the nano structure film and thereby growing a plurality of nano coral-shaped structures on the petal-shaped structure. | ||
| 地址 | Taipei TW | ||