Laser system chiller

摘要

A laser system includes a laser element, a pump source configured to input light to the laser element, a first cooling circuit and a second cooling circuit. The first cooling circuit includes a first pump configured to drive a first flow of cooling liquid through a first fluid pathway, a first primary heat exchanger configured to cool the first flow of cooling liquid, and a laser element heat exchanger configured to remove heat from the laser element using the first flow of cooling liquid. The second cooling circuit includes a second pump configured to drive a flow of cooling liquid through a second fluid pathway, a second primary heat exchanger configured to cool the second flow of cooling liquid, and a pump source heat exchanger configured to remove heat from the pump source using the first and second flows of cooling liquid.

主权项

1. A laser system comprising:
a laser element; a pump source configured to input light to the laser element; a first cooling circuit comprising:
a first pump configured to drive a first flow of cooling liquid through a first fluid pathway;a first primary heat exchanger in the first fluid pathway configured to cool the first flow of cooling liquid; anda laser element heat exchanger configured to remove heat from the laser element using the first flow of cooling liquid; and a second cooling circuit comprising:
a second pump configured to drive a flow of cooling liquid through a second fluid pathway;a second primary heat exchanger in the second fluid pathway configured to cool the second flow of cooling liquid; anda pump source heat exchanger configured to remove heat from the pump source using the first and second flows of cooling liquid; wherein:
a cooling power delivered from the first and second cooling circuits to the pump source is configured to maintain the pump source within a first temperature range;a cooling power delivered from a second cooling circuit to the laser element is configured to maintain the laser element within a second temperature range; andthe first and second temperature ranges are different.