Apparatus for aligning dispenser using alignment plate and dispenser alignment system

摘要

An apparatus for aligning a dispenser includes a table having a first alignment mark, an alignment plate provided along at least one side of the table, at least one syringe supplying a dispensing material to the alignment plate through a nozzle provided at one end portion thereof to form a second alignment mark, a first image camera provided along a side of the syringe and detecting an image of the second alignment mark, a second image camera detecting an image of the first alignment mark, and an alignment control unit aligning the image of the second alignment mark and a first reference position, and aligning an image of the first alignment mark and a second reference position.

主权项

1. An apparatus for aligning a dispenser, comprising:
a table having a top surface on which a substrate is loaded, a bottom surface below the top surface, and outer lateral surfaces between the top surface and the bottom surface, a first alignment mark being formed on the top surface of the table; an alignment plate provided along at least one outer lateral surface of the table, the alignment plate having a top surface, a bottom surface, and lateral surfaces between the top surface and the bottom surface; at least one syringe supplying a dispensing material to the alignment plate through a nozzle provided at one end portion thereof to form a second alignment mark on the top surface of the alignment plate by the dispensing material; a first image camera provided along a side of the syringe and detecting an image of the second alignment mark; a second image camera detecting an image of the first alignment mark; and an alignment control unit is configured to align the image of the second alignment mark and a first reference position, and aligning the image of the first alignment mark and a second reference position, wherein said alignment plate is disposed at a side of the substrate loaded on the table, wherein one of the lateral surfaces of the alignment plate is contacted with one of the outer lateral surfaces of the table so that the top surface of the alignment plate and a top surface of the substrate loaded on the table are coplanar.