WORKPIECE PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a workpiece processing method capable of easily dividing a workpiece.SOLUTION: A workpiece processing method includes: a modified layer formation step for irradiating a workpiece (11) with a laser beam (L1) of a wavelength having transmissivity to form a modified layer (25) inside the workpiece; and a division step for irradiating the workpiece with a laser beam (25) of the wavelength on a suction side in the vicinity of the suction end of the workpiece along the modified layer after executing the modified layer formation step and dividing the workpiece using the modified layer as a starting point.