发明名称 SUBSTRATE FILM FOR DICING
摘要 PROBLEM TO BE SOLVED: To provide a substrate film for dicing which is extended sufficiently during expanding process by suppressing generation of sawdust during dicing process, and in which interlayer peeling of each layer is prevented (interlayer strength is maintained) during pickup process.SOLUTION: In a substrate film for dicing formed by laminating in the order of A layer/B layer/C layer, the A layer is composed of a resin composition containing a polymethyl pentene-based resin, the B layer is composed of a resin composition containing at least one kind of component selected from a group consisting of amorphous polyolefin and an olefin-based thermoplastic elastomer, and the C layer is composed of a resin composition containing at least one kind of component selected from a group consisting of branched chain low density polyethylene and straight chain low density polyethylene.
申请公布号 JP2015070092(A) 申请公布日期 2015.04.13
申请号 JP20130202543 申请日期 2013.09.27
申请人 GUNZE LTD 发明人 OKAGAWA MASAAKI
分类号 H01L21/301;B32B27/32 主分类号 H01L21/301
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