| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical device which is advantageous on deforming a reflection surface of a mirror.SOLUTION: An optical device which deforms a reflection surface of a mirror includes: a base plate; a plurality of first actuators which have first ends connected to a surface of the mirror opposite to the reflection surface, and second ends connected to the base plate, and add force to the surface opposite to the reflection surface, respectively, by deforming so as to vary distance between the first ends and the second ends; a plurality of second actuators with rigidity lower than that of the first actuators, which are arranged between the mirror and the base plate, and add the force to the surface opposite to the reflection surface, respectively; a sensor which detects information showing drive states in each of the plurality of first actuators; and a control part which controls drive of the respective first actuators and the respective second actuators so that a shape of the reflection surface becomes a target shape based on output from the sensor. |
