| 摘要 |
<p>Disclosed is a film-based mems mass producing process. According to an aspect of the present invention, provided is a film-based mems mass production process which comprising a film attachment step attaching double side tape on the upper surface of a support panel, and attaching a film which is a base material on the upper surface of the double side tape; and a fixing pin installation step of installing multiple fixing pins to vertically penetrate the support panel, the double side tape, and the film.</p> |
