| 摘要 |
<p>A wafer transport pod for storing or transporting semiconductor wafers during semiconductor wafer processing includes a body having a top panel, a bottom panel, a back panel, two side panels, and a front panel. The front panel provides an inlet and an outlet of the semiconductor water to the inside and the outside of the water transport pod. The two side panels are configured for receiving the semiconductor wafers therebetween. The two side panels have a plurality of separately sealed partitions inside the body, and any two of the sealed partitions seal the water inside to prevent the contamination of the wafer. The each sealed partition determines the position of the wafer.</p> |
