| 摘要 |
PROBLEM TO BE SOLVED: To improve the accuracy of positioning an optical waveguide and an optical fiber in an optical semiconductor element and a manufacturing method therefor, as well as reduce the size of the optical semiconductor element.SOLUTION: The objective is achieved by an optical semiconductor element comprising a semiconductor substrate 30 equipped with a first principal surface 30a and a second principal surface 30b in which a plurality of first grooves 30c are formed, a first optical waveguide 30d which is a portion between the first grooves 30c of the semiconductor substrate 30 and in which a side surface 30k is defined by the first grooves 30c, and a photoelectric conversion unit 25 for transmitting or receiving an optical signal L propagating through the first optical waveguide 30d, the first grooves 30c defining part of a guide hole 41. |
