发明名称 |
Method and Apparatus of Forming Silicon Nitride Film |
摘要 |
Provided is a method of forming a silicon nitride film on a surface to be processed of a target object, which includes: repeating a first process a first predetermined number of times, the process including supplying a silicon source gas containing silicon toward the surface to be processed and supplying a decomposition accelerating gas containing a material for accelerating decomposition of the silicon source gas toward the surface to be processed; performing a second process of supplying a nitriding gas containing nitrogen toward the surface to be processed a second predetermine number of times; and performing one cycle a third predetermined number of times, the one cycle being a sequence including the repetition of the first process and the performance of the second process to form the silicon nitride film on the surface to be processed. |
申请公布号 |
US2015099374(A1) |
申请公布日期 |
2015.04.09 |
申请号 |
US201414506881 |
申请日期 |
2014.10.06 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
KAKIMOTO Akinobu;HASEBE Kazuhide |
分类号 |
H01L21/02;C23C16/52;C23C16/34;C23C16/458;C23C16/50 |
主分类号 |
H01L21/02 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method of forming a silicon nitride film on a surface to be processed of a target object, the method comprising:
repeating a first process a first predetermined number of times, the process including supplying a silicon source gas containing silicon toward the surface to be processed and supplying a decomposition accelerating gas containing a material for accelerating decomposition of the silicon source gas toward the surface to be processed; performing a second process of supplying a nitriding gas containing nitrogen toward the surface to be processed a second predetermine number of times; and performing one cycle a third predetermined number of times, the one cycle being a sequence including the repetition of the first process and the performance of the second process to form the silicon nitride film on the surface to be processed. |
地址 |
Tokyo JP |