METHOD OF FUSING GLASS SUBSTRATE BY LASER BEAM, AND LASER PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To joint overlaid glass substrates to each other using inexpensive laser beam and with a simple constitution.SOLUTION: A glass substrate fusion method of fusing glass substrates overlaid on each other by radiating laser beam to the glass substrates includes a first step and a second step. In the first step, a first glass substrate and a second glass substrate are overlaid on each other. In the second step, first laser beam and second laser beam respectively with wavelength of 2.7 μm or more and 6.0 μm or less and power not to melt surfaces of the glass substrates are condensed, and the first laser beam is radiated from a first main surface side of the first glass substrate, and the second laser beam is radiated from side faces of the first and second glass substrates, so that an overlaid portion of the condensed laser beams passes between the two glass substrates. First and second glass substrates are molten and fused at the overlaid portion of the condensed laser beams.