OPTICAL AXIS ADJUSTMENT METHOD AND INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technique of detecting misalignment of an optical axis position of a laser beam while suppressing degradation in inspection efficiency.SOLUTION: An inspection device 100 adjusts an optical axis position of pump light LP 13 linearly polarized in a second direction orthogonal to a first direction with respect to measurement probe light LP 11 linearly polarized in the first direction and radiated to a solar cell 9. More specifically, a beam splitter BP 1 splits part of the measurement probe light LP 11 and the measurement pump light LP 13, and a polarizer 126 causes either the split measurement probe light LP 11 or the split measurement pump light LP 13 to be incident on an image sensor 127. The inspection device 100 adjusts the optical axis position of the measurement pump light LP 13 on the basis of comparison between an incident position of the measurement probe light LP 11 and that of the measurement pump light LP 13 detected by the image sensor 127.