COIL ANTENNA WITH PLURAL RADIAL LOBES

摘要

A low inductance coil antenna for a plasma reactor has plural conductor lobes extending radially from respective RF supply connections.

主权项

1. A coil antenna comprising:
plural conductive lobes extending in respective radial directions with respect to a central axis, each of said plural conductive lobes comprising an elongate conductor having a first end and a second end; and a first connection to the first ends of said plural conductive lobes and a second connection to the second ends of said plural conductive lobes, said first and second connections being adapted for coupling to an RF power source.