| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent reduction in the quality of discharge by suppressing changes in pressure in a discharge chamber and inflow of impurities such as atmospheric air into the discharge chamber in a gas laser oscillator.SOLUTION: On one end of a cylinder 1, a gasket 13 for sealing a region only for a discharge chamber 2 is mounted and a bracket 6 is also mounted via a gasket 14 for sealing the discharge chamber 2 and a cavity 12 together. Moreover, on the other side of the cylinder 1, a gasket 15 for sealing a region only for the discharge chamber 2 is mounted, a glass plate 8 is also mounted via a gasket 16 for sealing the discharge chamber 2 and the cavity 12 together, and a bracket 9 is further mounted. Inflow of impurities such as atmospheric pressure into the discharge chamber 2 is suppressed by making internal pressure in the cavity 12 lower than the discharge chamber 2 or making it higher than the atmospheric air.</p> |
