| 摘要 |
<p>The pumping system comprises turbomolecular pump (3,4) and two fore-vacuum pumps (5,6). A connection conduit (8) is extended between the two fore-vacuum pumps. A cross-section constriction portion (9) is provided for reducing and regulating of flow of gas. The cross-section constriction portion is formed as one of throttle orifice, throttle valve, and gas flow controller. A regular or switched valve is provided in cross-section constriction portion. An independent claim is included for method for controlling pumping system.</p> |
