FLOW PATH MEMBER, AND ADSORPTION DEVICE AND REFRIGERATION DEVICE EMPLOYING SAME

摘要

A flow path member 1 according to one aspect of the invention includes a main body 4 formed of a ceramic sintered body in which a first flow path 6 is provided so as to allow a fluid to flow therethrough, wherein the main body 4 includes a projection 10 formed of part of the ceramic sintered body on an inner wall of the first flow path 6. An adsorption device according to one aspect of the invention includes the flow path member 1 that adsorbs a workpiece 2 and a fluid supplying unit that supplies a fluid to the first flow path 6 of the flow path member 1. A cooling device according to one aspect of the invention includes the flow path member 1 that cools an object and a fluid supplying unit that supplies a fluid which is a cooling fluid to the first flow path 6 of the flow path member 1.