SEMICONDUCTOR PROBE FOR TESTING QUANTUM CELL, TEST DEVICE, AND TEST METHOD

摘要

There are provided a testing device and a testing method of a quantum battery by a semiconductor probe capable of evaluating electric characteristics of a charge layer in the middle of a production process of the quantum battery without damaging the charge layer. On a semiconductor probe 50 constituted by stacking an electrode 54 and a metal oxide semiconductor 56 on a support body 52, and a probe charge layer 58 is formed of the same material as that of the quantum battery and irradiated with ultraviolet rays. Forming the probe charge layer 58 of the same material as that of the quantum battery on the semiconductor probe 50 enables evaluation without damaging the charge layer of the quantum battery. The testing device and the testing method are provided which measure the charge/discharge characteristics of a charge layer 18 in the middle of producing the quantum battery by a voltmeter 64 and a constant current source 62 or a discharge resistor 66 by using the semiconductor probe 50 including the probe charge layer 58.