发明名称 |
Resonant pressure sensor and manufacturing method therefor |
摘要 |
A resonant pressure sensor includes a first substrate including a and at least one projection disposed on the diaphragm, and at least one resonator disposed in the first substrate, at least a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate. |
申请公布号 |
EP2840373(A3) |
申请公布日期 |
2015.04.08 |
申请号 |
EP20140181249 |
申请日期 |
2014.08.18 |
申请人 |
YOKOGAWA ELECTRIC CORPORATION |
发明人 |
YOSHIDA, TAKASHI;YOSHIDA, YUUSAKU;YUMOTO, ATSUSHI;SUZUKI, YOSHITAKA |
分类号 |
G01L9/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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