| 摘要 |
The objective of the present invention is to provide the radiation-sensitive resin composition that prevents the defects and create the satisfactory resist pattern. For such, the present invention includes (A) a block copolymer that contains at least an acidic dissociative polymer block (I) and an alkali dissociative polymer block (II), and has the same polymer block (I) or the same polymer block (II) or their block copolymer containing water repellency at both sides thereof; and (B) an acidic radiation-sensitive component. |
