| 发明名称 | MEMS structure with adjustable ventilation openings | ||
| 摘要 | A MEMS structure includes a backplate, a membrane, and an adjustable ventilation opening configured to reduce a pressure difference between a first space contacting the membrane and a second space contacting an opposite side of the membrane. The adjustable ventilation opening is passively actuated as a function of the pressure difference between the first space and the second space. | ||
| 申请公布号 | US9002037(B2) | 申请公布日期 | 2015.04.07 |
| 申请号 | US201213531373 | 申请日期 | 2012.06.22 |
| 申请人 | Infineon Technologies AG | 发明人 | Dehe Alfons;Herrmann Matthias;Krumbein Ulrich;Barzen Stefan;Klein Wolfgang;Friza Wolfgang;Wurzer Martin |
| 分类号 | H04R25/00;H04R3/00;B81B7/00;H04R7/18;H04R19/00 | 主分类号 | H04R25/00 |
| 代理机构 | Slater & Matsil, L.L.P. | 代理人 | Slater & Matsil, L.L.P. |
| 主权项 | 1. A MEMS structure comprising: a backplate; a membrane spaced a gap distance from the backplate; and an adjustable ventilation opening configured to reduce a pressure difference between a first space contacting a first side of the membrane and a second space contacting an opposite second side of the membrane, wherein the adjustable ventilation opening is passively actuated as a function of the pressure difference between the first space and the second space. | ||
| 地址 | Neubiberg DE | ||