发明名称 Conductive film and semiconductor device
摘要 A conductive film of an embodiment includes: a fine catalytic metal particle as a junction and a graphene extending in a network form from the junction.
申请公布号 US9000591(B2) 申请公布日期 2015.04.07
申请号 US201313768567 申请日期 2013.02.15
申请人 Kabushiki Kaisha Toshiba 发明人 Yamazaki Yuichi;Wada Makoto;Saito Tatsuro;Sakai Tadashi
分类号 H01L23/48;H01L23/498;H01L23/532;B82Y30/00 主分类号 H01L23/48
代理机构 Oblon, McClelland, Maier & Neustadt, L.L.P. 代理人 Oblon, McClelland, Maier & Neustadt, L.L.P.
主权项 1. A conductive film comprising: fine catalytic metal particles as a junction; a graphene extending in a network form from the junction; and an insulation film, a gap is formed between the insulation film and the graphene, and the fine catalytic metal particles are dispersed on the insulation film.
地址 Tokyo JP