发明名称 |
Conductive film and semiconductor device |
摘要 |
A conductive film of an embodiment includes: a fine catalytic metal particle as a junction and a graphene extending in a network form from the junction. |
申请公布号 |
US9000591(B2) |
申请公布日期 |
2015.04.07 |
申请号 |
US201313768567 |
申请日期 |
2013.02.15 |
申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
Yamazaki Yuichi;Wada Makoto;Saito Tatsuro;Sakai Tadashi |
分类号 |
H01L23/48;H01L23/498;H01L23/532;B82Y30/00 |
主分类号 |
H01L23/48 |
代理机构 |
Oblon, McClelland, Maier & Neustadt, L.L.P. |
代理人 |
Oblon, McClelland, Maier & Neustadt, L.L.P. |
主权项 |
1. A conductive film comprising:
fine catalytic metal particles as a junction; a graphene extending in a network form from the junction; and an insulation film, a gap is formed between the insulation film and the graphene, and the fine catalytic metal particles are dispersed on the insulation film. |
地址 |
Tokyo JP |