发明名称 PHENOLIC POLYMERS AND PHOTORESISTS COMPRISING SAME
摘要 The present invention relates to a novel polymer, including a phenol group located with an interval from backbones and a group instable to photogenerated acid, which is used as the component of functional resist for positive chemical amplification where provide are a polymer, including a repeat unit having a structure represented by chemical formula I, and a photoresist including the same.
申请公布号 KR20150035867(A) 申请公布日期 2015.04.07
申请号 KR20150025160 申请日期 2015.02.23
申请人 롬 앤드 하스 일렉트로닉 머트어리얼즈 엘엘씨 发明人 카메론 제임스 에프.
分类号 C08F220/14;C08F220/18;C08F220/30;C08F222/12;G03F7/00;G03F7/039;H01L21/266;H01L23/00 主分类号 C08F220/14
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