Metal salt-containing composition, substrate, manufacturing method of substrate

摘要

An object of the present invention is to provide a method for manufacturing a substrate having a metal complex film on the surface thereof. According to the present invention, a metal salt-containing composition containing a metal salt, a polyvalent carboxylic acid having a cis-form structure, and a solvent, in which: the molar ratio of the polyvalent carboxylic acid to the metal salt is not less than 0.5 and not more than 4.0; the moisture content of the composition is not less than 0.05% by weight is used in an application method to apply on a substrate. Thereafter, a two-step heat treatment is carried out.

主权项

1. A method for manufacturing a substrate having an oxidized metal thin film formed on the surface thereof, the method comprising:
an application step of applying on the surface of the substrate a solution comprising a Zn and/or In metal salt, a polyvalent carboxylic acid having a cis-form structure of —C(COOH)═C(COOH)—, and a solvent, the molar ratio of the polyvalent carboxylic acid to the Zn and/or In metal salt being not less than 0.5 and not more than 4.0, and the moisture content of the solution being not less than 4% by weight; a primary heating step of drying by heating the solution at a temperature of not lower than 100° C. and not higher than 150° C.; and a secondary heating step of further heating the substrate after the primary heating step at a temperature no lower than 400° C. and no higher than 500° C. thereby forming the oxidized metal thin film formed on the surface of the substrate.