MEMS microphone with spring suspended backplate

摘要

A MEMS microphone has a base, a backplate, and a backplate spring suspending the backplate from the base. The microphone also has a diaphragm forming a variable capacitor with the backplate.

主权项

1. A MEMS microphone comprising:
a base; a backplate having a plurality of apertures; a backplate spring suspending the backplate from the base, the backplate spring being a single solid member and substantially serpentine-shaped; and a diaphragm forming a variable capacitor with the backplate, wherein when the microphone is stationary, the backplate spring has a spring constant that is high enough to cause the backplate to remain substantially stationary upon receipt of audio signals having amplitudes on the order of magnitude of the human speaking voice.