| 发明名称 |
SEMICONDUCTOR DEVICE HAVING DUMMY CELL ARRAY |
| 摘要 |
A semiconductor device is disclosed. The semiconductor device includes a plurality of dummy gate lines parallel to each other in a first direction and extending in a second direction that is orthogonal to the first direction; a plurality of first dummy filling patterns between the plurality of dummy gate lines, the first dummy filling patterns parallel to each other in the first direction, and arranged apart from each other in the second direction; a plurality of first dummy vias on the plurality of first dummy filling patterns; and a plurality of first dummy wiring lines connected to the plurality of first dummy vias, the first dummy vias extending in the second direction, and parallel to each other in the first direction. |
| 申请公布号 |
US2015091188(A1) |
申请公布日期 |
2015.04.02 |
| 申请号 |
US201414493526 |
申请日期 |
2014.09.23 |
| 申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Lee Ji-myoung;Song Young-soo;Lee Bo-young;Lee Jun-min |
| 分类号 |
H01L27/02;H01L23/522;H01L23/528;H01L23/00 |
主分类号 |
H01L27/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A semiconductor device comprising:
a plurality of dummy gate lines parallel to each other in a first direction and extending in a second direction that is orthogonal to the first direction; a plurality of first dummy filling patterns between the plurality of dummy gate lines, the first dummy filling patterns parallel to each other in the first direction, and arranged apart from each other in the second direction; a plurality of first dummy vias on the plurality of first dummy filling patterns; and a plurality of first dummy wiring lines connected to the plurality of first dummy vias, the first dummy wiring lines extending in the second direction, and parallel to each other in the first direction. |
| 地址 |
Suwon-si KR |
