发明名称 |
SULFONIC ACID ESTER CONTAINING POLYMERS FOR ORGANIC SOLVENT BASED DUAL-TONE PHOTORESISTS |
摘要 |
Provided are chemically amplified resist compositions that include acid-labile sulfonate-ester photoresist polymers that are developable in an organic solvent. The chemically amplified resists produce high resolution positive tone development (PTD) and negative tone development (NTD) images depending on the selection of organic development solvent. Furthermore, the dissolution contrast of the traditional chemically amplified resists may be optimized for dual tone imaging through the addition of a photoresist polymer comprising an acid-labile sulfonate-ester moiety. |
申请公布号 |
WO2015045240(A1) |
申请公布日期 |
2015.04.02 |
申请号 |
WO2014JP03888 |
申请日期 |
2014.07.23 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION;JSR CORPORATION |
发明人 |
AYOTHI, RAMAKRISHNAN;SWANSON, SALLY ANN;WALLRAFF, GREGORY MICHAEL |
分类号 |
G03F7/038;G03F7/039;G03F7/32 |
主分类号 |
G03F7/038 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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