发明名称 SEMICONDUCTOR DEVICE HAVING A MONOLITHIC INTER-TIER VIA (MIV), AND METHOD OF MAKING SAME
摘要 A three dimensional semiconductor device includes a first memory device, a second memory device and a via. The via connects the first memory device to the second memory device.
申请公布号 US2015091098(A1) 申请公布日期 2015.04.02
申请号 US201314039481 申请日期 2013.09.27
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 HUANG Tsung-Hsien;CHENG Hong-Chen;LEE Cheng-Hung;LIAO Hung-Jen
分类号 H01L27/112;H01L23/522 主分类号 H01L27/112
代理机构 代理人
主权项 1. A three dimensional semiconductor device comprising: a first memory device; a second memory device; and a via, wherein the via connects the first memory device to the second memory device.
地址 Hsinchu TW