ENGINEERED SUBSTRATE ASSEMBLIES WITH THERMALLY OPAQUE MATERIALS, AND ASSOCIATED SYSTEMS, DEVICES, AND METHODS

摘要

Engineered substrates having thermally opaque materials for preventing transmission of radiative energy during epitaxial growth processes and for separating substrates from epitaxially grown semiconductor structures and associated systems and methods are disclosed herein. In several embodiments, for example, an engineered substrate can be manufactured by forming a thermally opaque material at an upper surface of a handle substrate and bonding an epitaxial formation structure on the handle substrate such that the thermally opaque material is between the epitaxial formation structure and the handle substrate. In various embodiments, the thermally opaque material at least partially blocks radiative heat transmission between the handle substrate and the epitaxial formation structure, for example, to provide increased accuracy of epitaxy process temperature measurements and/or increased uniformity of epitaxy growth characteristics across the engineered substrate.

主权项

1. A substrate assembly, comprising:
a handle substrate; an thermally opaque material on the handle substrate; and an epitaxial formation structure on the thermally opaque material; wherein the thermally opaque material is configured to at least partially block radiative heat transmission between the handle substrate and the epitaxial formation structure.