ANODICALLY BONDED CELLS WITH OPTICAL ELEMENTS

摘要

The disclosure provides an optical apparatus including at least one optical element including glass, at least one support including silicon and a housing including glass. Furthermore, the at least one optical element and the at least one support can be anodically bonded together, and the at least one support and the housing can be anodically bonded together. The disclosure further provides a method for fabricating optical components with durable bonds and incorporates active alignment.