发明名称 IMPEDANCE MATCHING METHOD AND MATCHING SYSTEM FOR THE METHOD
摘要 PROBLEM TO BE SOLVED: To provide an impedance matching method and a matching system for the method.SOLUTION: This method is a matching method of an electrical device including a power source, a load, a power transmission line and a matching system. The method includes the steps of: measuring an electrical characteristic of the power transmission line; determining a pulse mode of the power source; extracting a control parameter for impedance matching from the electrical characteristic of the power transmission line; and controlling the matching system by using the control parameter, where the matching system is controlled differently according to the pulse mode.
申请公布号 JP2015062309(A) 申请公布日期 2015.04.02
申请号 JP20140237941 申请日期 2014.11.25
申请人 PLASMART CO LTD 发明人 KIM JAE-HYUN;LEE SANG-WON;LEE YONG-GWAN
分类号 H03H7/40 主分类号 H03H7/40
代理机构 代理人
主权项
地址