摘要 |
PROBLEM TO BE SOLVED: To provide an impedance matching method and a matching system for the method.SOLUTION: This method is a matching method of an electrical device including a power source, a load, a power transmission line and a matching system. The method includes the steps of: measuring an electrical characteristic of the power transmission line; determining a pulse mode of the power source; extracting a control parameter for impedance matching from the electrical characteristic of the power transmission line; and controlling the matching system by using the control parameter, where the matching system is controlled differently according to the pulse mode. |